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TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films

Type:
Journal
Info:
Journal of Applied Physics 117, 134105 (2015)
Date:
2015-03-22
DOI:
http://dx.doi.org/10.1063/1.4916715

Author Information

Name Institution
Patrick D. LomenzoUniversity of Florida
Qanit TakmeelUniversity of Florida
Chuanzhen ZhouNorth Carolina State University
Chris M. FancherNorth Carolina State University
Eric LambersUniversity of Florida
Nicholas G. RudawskiUniversity of Florida
Jacob L. JonesNorth Carolina State University
Saeed MoghaddamUniversity of Florida
Toshikazu NishidaUniversity of Florida

Films

Plasma HfSiOx

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me2N)4Hf, also CAS# 19782-68-4
CAS#: 19962-11-9
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane
CAS#: 15112-89-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: ION TOF TofSIMS 5

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI VersaProbe 5000

Characteristic: Hysteresis
Analysis: P-V, Polarization-Voltage Measurements
Diagnostic: -

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent 4294A

Characteristic: Pulsed Transient Current Measurement
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Agilent 33511B

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2010F

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2010F

Substrates

TaN

Notes

Ultratech/Cambridge NanoTech Fiji PEALD Si:HfO2 for ferroelectric study.
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