Qanit Takmeel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qanit Takmeel returned 4 record(s).

Number	Title
1	Annealing behavior of ferroelectric Si-doped HfO₂ thin films
2	Ferroelectric phenomena in Si-doped HfO₂ thin films with TiN and Ir electrodes
3	The effects of layering in ferroelectric Si-doped HfO₂ thin films
4	TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO₂ thin films