Chuanzhen Zhou Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chuanzhen Zhou returned 3 record(s).

Number	Title
1	TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO₂ thin films
2	Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films
3	The effects of layering in ferroelectric Si-doped HfO₂ thin films