Chris M. Fancher Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris M. Fancher returned 3 record(s).

Number	Title
1	Ferroelectric phenomena in Si-doped HfO₂ thin films with TiN and Ir electrodes
2	TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO₂ thin films
3	The effects of layering in ferroelectric Si-doped HfO₂ thin films