Jacob L. Jones Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jacob L. Jones returned 6 record(s).

Number	Title
1	Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films
2	The effects of layering in ferroelectric Si-doped HfO₂ thin films
3	Ferroelectric phenomena in Si-doped HfO₂ thin films with TiN and Ir electrodes
4	TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO₂ thin films
5	Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
6	Thermal stability of antiferroelectric-like Al:HfO₂ thin films with TiN or Pt electrodes