Toshikazu Nishida Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Toshikazu Nishida returned 5 record(s).

Number	Title
1	TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO₂ thin films
2	Annealing behavior of ferroelectric Si-doped HfO₂ thin films
3	The effects of layering in ferroelectric Si-doped HfO₂ thin films
4	Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
5	Ferroelectric phenomena in Si-doped HfO₂ thin films with TiN and Ir electrodes