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Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD

Type:
Journal
Info:
physica status solidi (a) Volume 216, Issue 10, pages 1800617, 2019
Date:
2018-10-18
DOI:
http://dx.doi.org/10.1002/pssa.201800617

Author Information

Name Institution
Alexander S. GudovskikhSt. Petersburg Academic University
Alexander V. UvarovSt. Petersburg Academic University
Ivan A. MorozovSt. Petersburg Academic University
Artem I. BaranovSt. Petersburg Academic University
Dmitry A. KudryashovSt. Petersburg Academic University
Kirill S. ZelentsovSt. Petersburg Academic University
Alexandre JaffréGeePs Group of electrical engineering - Paris
Sylvain Le GallGeePs Group of electrical engineering - Paris
Arouna DargaGeePs Group of electrical engineering - Paris
Aurore Brezard-OudotGeePs Group of electrical engineering - Paris
Jean-Paul KleiderGeePs Group of electrical engineering - Paris

Films

Plasma GaP

Hardware used: Oxford Instruments Plasmalab 100
TMG, trimethyl galium, GaMe3
CAS#: 1445-79-0
PH3, Phospine, Phosphane
CAS#: 7803-51-2
Deposition Temperature = 380C

Plasma Si:GaP

Hardware used: Oxford Instruments Plasmalab 100
TMG, trimethyl galium, GaMe3
CAS#: 1445-79-0
PH3, Phospine, Phosphane
CAS#: 7803-51-2
SiH4, Silane
CAS#: 7803-62-5
Deposition Temperature = 380C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: GDOES, Glow Discharge Optical Emission Spectroscopy
Diagnostic: -

Characteristic: Electron Concentration
Analysis: Electrochemical C-V
Diagnostic: -

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2010F

Characteristic: Conductance
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Keithley 2400 Source Meter

Characteristic: IQE, Internal Quantum Efficiency
Analysis: Custom
Diagnostic: Custom

Characteristic: Electron Concentration
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Characteristic: Mobility
Analysis: Hall Measurements
Diagnostic: Ecopia HMS-3000

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent E4980A Precision LCR Meter

Substrates

Si(001)

Notes

1293