Ivan A. Morozov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ivan A. Morozov returned 8 record(s).

Number	Title
1	Influence of PE-ALD of GaP on the Silicon Wafers Quality
2	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
3	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
4	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
5	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
6	Study of GaP/Si Heterojunction Solar Cells
7	Low temperature plasma enhanced deposition of GaP films on Si substrate
8	Thin film GaP for solar cell application