Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Kirill S. Zelentsov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kirill S. Zelentsov returned 3 record(s).

NumberTitle
1Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2Influence of PE-ALD of GaP on the Silicon Wafers Quality
3Study of GaP/Si Heterojunction Solar Cells