Kirill S. Zelentsov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kirill S. Zelentsov returned 3 record(s).

Number	Title
1	Influence of PE-ALD of GaP on the Silicon Wafers Quality
2	Study of GaP/Si Heterojunction Solar Cells
3	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD