Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 11 records.

Number	Title
1	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2	Low temperature plasma enhanced deposition of GaP films on Si substrate
3	Study of GaP/Si Heterojunction Solar Cells
4	Thin film GaP for solar cell application
5	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
6	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
7	Influence of PE-ALD of GaP on the Silicon Wafers Quality
8	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
9	Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
10	Capacitance characterization of GaP/n-Si structures grown by PE-ALD
11	Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition