Alexander V. Uvarov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander V. Uvarov returned 7 record(s).

Number	Title
1	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
3	Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4	Low temperature plasma enhanced deposition of GaP films on Si substrate
5	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
6	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
7	Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition