Artem I. Baranov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Artem I. Baranov returned 7 record(s).

Number	Title
1	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
2	Influence of PE-ALD of GaP on the Silicon Wafers Quality
3	Study of GaP/Si Heterojunction Solar Cells
4	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
5	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
6	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
7	Capacitance characterization of GaP/n-Si structures grown by PE-ALD