Inductively coupled plasma sources from Plasma ALD, LLC.


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Arouna Darga Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Arouna Darga returned 3 record(s).

NumberTitle
1Influence of PE-ALD of GaP on the Silicon Wafers Quality
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD