Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Arouna Darga Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Arouna Darga returned 3 record(s).

NumberTitle
1Capacitance characterization of GaP/n-Si structures grown by PE-ALD
2Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
3Influence of PE-ALD of GaP on the Silicon Wafers Quality