Alexander S. Gudovskikh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander S. Gudovskikh returned 12 record(s).

Number	Title
1	Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
2	Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
3	Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4	Low temperature plasma enhanced deposition of GaP films on Si substrate
5	Capacitance characterization of GaP/n-Si structures grown by PE-ALD
6	Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
7	Influence of PE-ALD of GaP on the Silicon Wafers Quality
8	Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
9	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
10	Thin film GaP for solar cell application
11	Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
12	Study of GaP/Si Heterojunction Solar Cells