Your search for plasma enhanced atomic layer deposition publications discussing ZrON films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen|
|2||Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics|
|3||Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation|
|4||In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics|
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