TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Where to buy

NumberVendorRegionLink
1Pegasus Chemicals🇬🇧Tris(diethylamido)(tert-butylimido)niobium
2Ereztech🇺🇸Tris(diethylamido) (tert-butylimido) niobium(V)
3Strem Chemicals, Inc.🇺🇸(t-Butylimido)tris(diethylamino)niobium(V), min. 98%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
3Performance of Samples with Novel SRF Materials and Growth Techniques
4Plasma-enhanced atomic layer deposition of superconducting niobium nitride
5Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
6Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
7In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
8Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
9Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
10Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
11Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
12Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
13Atomic Layer Deposition of Niobium Nitride from Different Precursors
14Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
15Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
16Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
17Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
18Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate