Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH3)2]3[=NC(CH3)3], TBTMET, TBTDMT, CAS# 69039-11-8

Where to buy

1Strem Chemicals, Inc.t-Butylimidotris(dimethylamino)tantalum(V), min. 98%
2Strem Chemicals, Inc.t-Butylimidotris(dimethylamido)tantalum(V), min. 98%, contained in 50 ml cylinder for CVD/ALD

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Trilayer Tunnel Selectors for Memristor Memory Cells
2Trilayer Tunnel Selectors for Memristor Memory Cells
3Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD


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