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Nathan Nelson-Fitzpatrick Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Nathan Nelson-Fitzpatrick returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2 |
| 2 | Atomic layer deposition of TiN for the fabrication of nanomechanical resonators |