Ming-Jie Zhao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ming-Jie Zhao returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
2Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy