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Kirill S. Zelentsov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kirill S. Zelentsov returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Study of GaP/Si Heterojunction Solar Cells |
| 2 | Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD |
| 3 | Influence of PE-ALD of GaP on the Silicon Wafers Quality |