Nozomu Hattori Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nozomu Hattori returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant


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