Critical Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Critical Temperature returned 10 record(s).

Number	Title
1	A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2	Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
3	Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
4	Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
5	Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
6	Microwave properties of superconducting atomic-layer deposited TiN films
7	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
8	Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
9	Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
10	Atomic layer deposition of titanium nitride for quantum circuits