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Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor

Type:
Journal
Info:
Journal of Nanotechnology Volume 2018, Article ID 9549853
Date:
2018-08-13
DOI:
https://doi.org/10.1155/2018/9549853

Author Information

Name Institution
Yuri D. IvanovInstitute of Biomedical Chemistry
Kristina A MalsagovaInstitute of Biomedical Chemistry
Tatyana O PleshakovaInstitute of Biomedical Chemistry
Rafael A GaliullinInstitute of Biomedical Chemistry
Andrey F KozlovInstitute of Biomedical Chemistry
Ivan D ShumovInstitute of Biomedical Chemistry
Irina A IvanovaInstitute of Biomedical Chemistry
Alexander I. ArchakovInstitute of Biomedical Chemistry
Vladimir P. PopovRussian Academy of Sciences
Alexander V LatyshevRussian Academy of Sciences
Konstantin V. RudenkoRussian Academy of Sciences
Alexander V. GlukhovNovosibirsk Semiconductor Device Plant and Design Bureau

Films

Plasma HfO2

Hardware used: Oxford Instruments FlexAL
TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf
CAS#: 352535-01-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 270C

Plasma Al2O3

Hardware used: Oxford Instruments FlexAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Substrates

Notes

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