Konstantin V. Rudenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Konstantin V. Rudenko returned 7 record(s).

Number	Title
1	Properties of plasma enhanced atomic layer deposited ruthenium thin films from Ru(EtCp)2
2	Plasma Enhanced Atomic Layer Deposition of Ruthenium Films Using Ru(EtCp)2 Precursor
3	Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor
4	Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
5	Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
6	Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition
7	Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer