Alexander V. Glukhov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexander V. Glukhov returned 3 record(s).

Number	Title
1	Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
2	Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor
3	Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection