Vladimir P. Popov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vladimir P. Popov returned 3 record(s).

Number	Title
1	Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection
2	Biosensor properties of SOI nanowire transistors with a PEALD Al₂O₃ dielectric protective layer
3	Ultrasensitive Detection of 2,4-Dinitrophenol Using Nanowire Biosensor