David Wei Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David Wei Zhang returned 12 record(s).

Number	Title
1	Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
2	Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
3	Optical properties and bandgap evolution of ALD HfSiOx films
4	Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets
5	Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
6	Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
7	Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
8	Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
9	Reactions of ruthenium cyclopentadienyl precursor in the metal precursor pulse of Ru atomic layer deposition
10	Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
11	Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation
12	Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application