Jung-Dae Kwon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jung-Dae Kwon returned 8 record(s).

Number	Title
1	Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl₄ and N₂/H₂/Ar radicals
2	Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
3	Alloyed 2D Metal-Semiconductor Atomic Layer Junctions
4	Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
5	Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
6	A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
7	Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N₂/H₂/Ar Plasma
8	Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity