Jennifer K. Hite Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jennifer K. Hite returned 8 record(s).

Number	Title
1	Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
2	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
3	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
4	Atomic layer epitaxy for quantum well nitride-based devices
5	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
6	Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
7	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
8	Perspectives on future directions in III-N semiconductor research