InN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing InN films returned 21 record(s).

Number	Title
1	In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
2	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
3	The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
4	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
5	Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
6	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
7	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
8	Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition
9	Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
10	Perspectives on future directions in III-N semiconductor research
11	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
12	Atomic layer deposition of InN using trimethylindium and ammonia plasma
13	Atomic layer epitaxy for quantum well nitride-based devices