Electron Temperature, Te Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Temperature, Te returned 11 record(s).

Number	Title
1	Uniformity of HfO₂ Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
2	Atomic Layer Deposition Al₂O₃ Thin Films in Magnetized Radio Frequency Plasma Source
3	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
4	Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
5	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
6	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
7	Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
8	Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature
9	Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
10	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
11	Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition