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Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (19), pp 10228-10237
Date:
2015-04-28
DOI:
http://dx.doi.org/10.1021/acsami.5b00677

Author Information

Name Institution
Wei-Cheng WangNational Taiwan University
Meng-Chen TsaiNational Taiwan University
Jason YangSunrise Global Solar Energy Co.
Chuck HsuSino-American Silicon Products Inc.
Miin-Jang ChenNational Taiwan University

Films

Thermal Al2O3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 200C

Plasma TiO2

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova NanoSEM 450

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2100F

Characteristic: Reflectance Spectra
Analysis: Reflection Spectroscopy
Diagnostic: Avantes AvaSpec-2048L

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent B1500A Semiconductor Device Analyzer

Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent B1500A Semiconductor Device Analyzer

Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent B1500A Semiconductor Device Analyzer

Characteristic: Minority Carrier Lifetime
Analysis: QSSPC, Quasi-Steady-State PhotoConductance Decay
Diagnostic: Sinton WCT-120 Lifetime Tester

Substrates

Si(100)
NBSi, Nanotextured Black Silicon

Notes

Ultratech Fiji thermal Al2O3/plasma TiO2 for silicon solar passivation.
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