Meng-Chen Tsai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Meng-Chen Tsai returned 8 record(s).

Number	Title
1	Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
2	Double nitridation of crystalline ZrO2/Al2O3 buffer gate stack with high capacitance, low leakage and improved thermal stability
3	Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
4	Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
5	Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
6	Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
7	Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
8	In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics