Plasma Enhanced Atomic Layer Deposition Publication Database 2014 Year in Review

The PEALD publication database makes it easy to analyze the activities of the PEALD community. Whatever type of data is captured in the database is available for further analysis.

I have taken all the publications I have found that were accepted for publication in 2014 and created several histograms that I though were interesting. I decided to use the accepted for publication date as the criterion because I wanted to capture publications based on work presented at the ALD 2014 conference in Kyoto, Japan. If I chose publication date, then many of the ALD 2014 papers would be delayed until next year because they are in the Jan/Feb 2015 issue of JVSTA.

To date, I have tracked down 131 publications using PEALD films accepted for publication during 2014. There are probably others I have not yet come across. Papers in which the focus is the development of PEALD films tend to be quite easy to track down. When PEALD is just one of the techniques utilized for some new application, finding the paper can be challenging, especially when few processing details are offered at which to point a search engine. Identifying these publications may be more challenging, but it is fun when I do find them and it is great to see the breadth of applications for which PEALD films are being utilized.

2014 PEALD Publications by Month

2014 PEALD Films

2014 PEALD Hardware

2014 PEALD Locations

2014 PEALD Journals

The 131 publications are spread out over 63 different journals and conferences. Below, the breakdown of how many PEALD references there are in each source is listed. The affiliation of the main ALD conference with the American Vacuum Society is likely the main cause for the high number of publications in JVSTA. It is great to see the diversity though. That means people are trying PEALD in all sorts of different applications.

17

Journal of Vacuum Science & Technology A

7

ACS Appl. Mater. Interfaces

6

Applied Physics Letters

6

Applied Surface Science

6

ECS Transactions

4

Thin Solid Films

4

Journal of Applied Physics

3

Solid-State Electronics

3

Journal of Materials Chemistry C

3

Nanotechnology

3

ECS Journal of Solid State Science and Technology

3

Physica Status Solidi (A)

3

IEEE Electron Device Letters

2

IEEE Transactions on Electron Devices

2

Journal of Materials Chemistry A

2

Nanoscale Research Letters

2

2014 IEEE 26th Intl Symp on Power Semi Devices & ICs (ISPSD)

2

2014 IEEE 6th International Memory Workshop (IMW)

2

Chemistry of Materials

2

2014 IEEE Intl Symposium on Circuits and Systems (ISCAS)

2

Journal of Physical Chemistry C

2

2014 IEEE MEMS Conf

2

Energy & Environmental Science

2

Advanced Functional Materials

2

Journal of Vacuum Science & Technology B

2

Solar Energy Materials and Solar Cells

1

Advanced Materials Research

1

Materials Research Bulletin

1

APL Materials

1

Japanese Journal of Applied Physics

1

Materials Sciences and Applications

1

Surface and Coatings Technology

1

Journal of Alloys and Compounds

1

Microelectronic Engineering

1

Microporous and Mesoporous Materials

1

2014 29th Symp on Microelec Tech and Devices (SBMicro)

1

archive.org

1

Journal of Electronic Materials

1

Nano Letters

1

2014 ECS and SMEQ Joint International Meeting

1

Biosensors and Bioelectronics

1

Chemical Communications

1

Journal of Microelectromechanical Systems

1

Optical Engineering

1

2014 IEEE International Reliability Physics Symposium

1

ChemSusChem

1

Journal of Nanoscience and Nanotechnology

1

Optical Materials Express

1

ECS Meeting

1

Journal of Physics D: Applied Physics

1

Physica Status Solidi (C)

1

Journal of Semiconductor Technology and Science

1

Physical Chemistry Chemical Physics

1

ACS Nano

1

Journal of the American Ceramic Society

1

Physical Review B

1

Advanced Engineering Materials

1

Facta universitatis - series: Electronics and Energetics

1

Journal of the American Chemical Society

1

Review of Scientific Instruments

1

Semiconductors

1

Advanced Materials

1

IEEE Transactions on Circuits and Systems II:Express Briefs

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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