Emanuela Schilirò Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Emanuela Schilirò returned 10 record(s).

Number	Title
1	Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO₂ dielectric layers
2	Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al₂O₃ gate dielectric thin films
3	Nanolaminated Al₂O₃/HfO₂ dielectrics for silicon carbide based devices
4	Negative charge trapping effects in Al₂O₃ films grown by atomic layer deposition onto thermally oxidized 4H-SiC
5	Laminated Al₂O₃-HfO₂ layers grown by atomic layer deposition for microelectronics applications
6	Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
7	Atomic Layer Deposition of Al₂O₃ Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
8	Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al₂O₃ thin films grown by Atomic Layer Deposition
9	Plasma enhanced atomic layer deposition of Al₂O₃ gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
10	Advances in the fabrication of graphene transistors on flexible substrates