Raffaella Lo Nigro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Raffaella Lo Nigro returned 10 record(s).

Number	Title
1	Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
2	Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
3	Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
4	Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
5	Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
6	Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
7	Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
8	Advances in the fabrication of graphene transistors on flexible substrates
9	Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
10	Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition