Woo-Hee Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Woo-Hee Kim returned 12 record(s).

Number	Title
1	Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
2	Growth characteristics and electrical properties of La₂O₃ gate oxides grown by thermal and plasma-enhanced atomic layer deposition
3	In situ surface cleaning on a Ge substrate using TMA and MgCp₂ for HfO₂-based gate oxides
4	Low-temperature atomic layer deposition of TiO₂, Al₂O₃,and ZnO thin films
5	Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO₂ layer
6	Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)₂ Precursor and Oxygen Gas
7	Plasma-Enhanced Atomic Layer Deposition of Ni
8	Growth characteristics and electrical properties of SiO₂ thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
9	Atomic layer deposition of B₂O₃/SiO₂ thin films and their application in an efficient diffusion doping process
10	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
11	Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
12	Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt