Ir Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ir films returned 9 record(s).

Number	Title
1	Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
2	Systematic efficiency study of line-doubled zone plates
3	Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
4	Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
5	TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
6	Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
7	High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds
8	Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
9	Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates