WN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing WN films returned 9 record(s).

Number	Title
1	Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
2	Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
3	Effects of NH₃ pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
4	A controlled growth of WN_x and WC_x thin films prepared by atomic layer deposition
5	A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
6	Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
7	Plasma-enhanced atomic layer deposition of tungsten nitride
8	Atomic layer deposition of WN_x thin films using a F-free tungsten metal-organic precursor and NH₃ plasma as a Cu-diffusion barrier
9	WN_x Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH₃ Plasma Radical for ULSI Applications