La₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing La₂O₃ films returned 11 record(s).

Number	Title
1	Effect of Thermal Annealing on La₂O₃ Films Grown by Plasma Enhanced Atomic Layer Deposition
2	Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
3	Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO₂ layer
4	XPS study of homemade plasma enhanced atomic layer deposited La₂O₃/ZrO₂ bilayer thin films
5	Effects of rapid thermal annealing on the properties of HfO₂/La₂O₃ nanolaminate films deposited by plasma enhanced atomic layer deposition
6	Resistive switching properties of plasma enhanced-ALD La₂O₃ for novel nonvolatile memory application
7	The Effects of Annealing Ambient on the Characteristics of La₂O₃ Films Deposited by RPALD
8	Growth characteristics and electrical properties of La₂O₃ gate oxides grown by thermal and plasma-enhanced atomic layer deposition
9	Comparison of the Deposition Characteristics and Electrical Properties for La₂O₃, HfO₂ and LHO Films
10	Effects of an Al₂O₃ capping layer on La₂O₃ deposited by remote plasma atomic layer deposition
11	Atomic Layer Deposition of La₂O₃ Thin Films by Using an Electron Cyclotron Resonance Plasma Source

La2O3 Plasma Enhanced Atomic Layer Deposition Film Publications