Porosity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Porosity returned 10 record(s).

Number	Title
1	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
3	Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
4	Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
5	Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
6	On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
7	Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
8	Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
9	Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
10	Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching