Efficiency Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Efficiency returned 12 record(s).

Number	Title
1	Simulation and Fabrication of HfO₂ Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
2	Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
3	Investigation of Atomic Layer Deposition Al₂O₃ Passivation for Screen-Printed Large-Area Solar Cells
4	Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
5	Industrially relevant Al₂O₃ deposition techniques for the surface passivation of Si solar cells
6	Silicon surface passivation by ultrathin Al₂O₃ films and Al₂O₃/SiN_x stacks
7	Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
8	Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
9	Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p⁺ Regions
10	Excellent surface passivation of crystalline silicon by ternary Al_xMg_1-xO_y thin films
11	Study of GaP/Si Heterojunction Solar Cells
12	Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes