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Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD

Type:
Journal
Info:
Electrochemical and Solid-State Letters, 7 (5) F31-F34 (2004)
Date:
2003-10-14
DOI:
http://dx.doi.org/10.1149/1.1667017

Author Information

Name Institution
Woong-Chul ShinElectronics and Telecommunication Research Institute, (ETRI)
Sang-Ouk RyuElectronics and Telecommunication Research Institute, (ETRI)
In-Kyu YouElectronics and Telecommunication Research Institute, (ETRI)
Sung-Min YoonElectronics and Telecommunication Research Institute, (ETRI)
S. M. ChoElectronics and Telecommunication Research Institute, (ETRI)
N. Y. LeeElectronics and Telecommunication Research Institute, (ETRI)
K. D. KimElectronics and Telecommunication Research Institute, (ETRI)
Byoung-Gon YuElectronics and Telecommunication Research Institute, (ETRI)
Won-Jae LeeDong-Eui University
Kyu-Jeong ChoiChungnam National University
Soon-Gil YoonChungnam National University

Films

Plasma SrBi2Ta2O9

Hardware used: Custom Direct Capacitively Coupled Plasma
Sr[Ta(OC2H5)5(OC2H4OCH3)]2
CAS#: 0-0-0
Bi(C6H5)3, Triphenyl Bismuth
CAS#: 603-33-8
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku D/Max-RC

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM20

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco Autoprobe CP

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Diagnostic: VG Scientific Microlab 310-D

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Cameca SX-51

Characteristic: Ferroelectricity
Analysis: Ferroelectrical Testing
Diagnostic: Radient Technology RT66A

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: HP 4145B Semiconductor Parameter Analyzer

Substrates

Pt

Notes

1168