Sang-Ouk Ryu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Ouk Ryu returned 3 record(s).

Number	Title
1	Electrical properties of SrTa₂O₆ thin films by plasma enhanced atomic layer deposition (PEALD)
2	Plasma-Enhanced Atomic Layer Deposition of SrTa₂O₆ Thin Films Using Sr[Ta(OC₂H₅)₅(OC₂H₄OCH₃)]₂ as Precursor
3	Low Voltage Switching Characteristics of 60 nm Thick SrBi₂Ta₂O₉ Thin Films Deposited by Plasma-Enhanced ALD