Inductively coupled plasma sources from Plasma ALD, LLC.


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K. D. Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. D. Kim returned 1 record(s).

NumberTitle
1Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD