Sung-Min Yoon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung-Min Yoon returned 2 record(s).

Number	Title
1	Electrical Characterization of Metal-Insulator-Semiconductor Capacitors Having Double-Layered Atomic-Layer-Deposited Al₂O₃ and ZnO for Transparent Thin Film Transistor Applications
2	Low Voltage Switching Characteristics of 60 nm Thick SrBi₂Ta₂O₉ Thin Films Deposited by Plasma-Enhanced ALD