Soon-Gil Yoon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Soon-Gil Yoon returned 5 record(s).

Number	Title
1	Electrical properties of Ga₂O₃-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
2	Low Voltage Switching Characteristics of 60 nm Thick SrBi₂Ta₂O₉ Thin Films Deposited by Plasma-Enhanced ALD
3	Plasma-Enhanced Atomic Layer Deposition of SrTa₂O₆ Thin Films Using Sr[Ta(OC₂H₅)₅(OC₂H₄OCH₃)]₂ as Precursor
4	Electrical characteristics of Ga₂O₃-TiO₂ nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
5	Electrical properties of SrTa₂O₆ thin films by plasma enhanced atomic layer deposition (PEALD)