Susanne Hoffmann-Eifert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Susanne Hoffmann-Eifert returned 5 record(s).

Number	Title
1	Energy dissipation during pulsed switching of strontium-titanate based resistive switching memory devices
2	Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD Sr_xTi_yO_z films
3	Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
4	Forming-free metal-oxide ReRAM by oxygen ion implantation process
5	Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices