Shi-Jin Ding Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shi-Jin Ding returned 10 record(s).

Number	Title
1	Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
2	Plasma-Assisted Atomic Layer Deposition of High-Density Ni Nanoparticles for Amorphous In-Ga-Zn-O Thin Film Transistor Memory
3	Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
4	Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)₂ as a Metal Precursor
5	Direct Growth of Al₂O₃ on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
6	Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
7	Resistive switching properties of plasma enhanced-ALD La₂O₃ for novel nonvolatile memory application
8	Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation
9	Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
10	Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment