Brian R. Bennett Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brian R. Bennett returned 5 record(s).

Number	Title
1	Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
2	High quality HfO₂/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8nm equivalent oxide thickness
3	Atomic layer deposition of Al₂O₃ on GaSb using in situ hydrogen plasma exposure
4	Performance enhancement of InAsSb QW-MOSFETs with in-situ H₂ plasma cleaning for gate stack formation
5	Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al₂O₃